HORIBA光纖型化學藥液濃度計CS-600F-1P25P5可以在單槽或單晶圓清洗系統(tǒng)中檢測多種化學藥液

2025/02/13 14:20:23

CS-600F

光纖型化學藥液濃度計

CS-600F 提供適合生產的更高級功能，如在各種應用中對高溫化學藥液進行在線測量的能力，減少停機時間的穩(wěn)定運行，以及提高空間生產率的緊湊尺寸，以滿足*半導體濕法制程所需的準確化學藥液濃度管理。

事業(yè)部: 半導體

產品分類: 濕法過程控制

制造商: HORIBA Advanced Techno Co., Ltd.

尺寸更小，布局更靈活
CS-600F 濃度計尺寸緊湊，與成熟型號（CS-100F1 系列）相比，高度降低 36%，體積減少 40%，樣品單元光纖電纜所需的空間減少 46%。
光源單元和濃度計主機可以遠程單獨安裝，支持根據化學藥液單元和清洗設備的位置靈活安裝。

高溫化學溶液（20 至 80℃）的高穩(wěn)定性在線測量
新的光學系統(tǒng)和改進的處理算法支持在線測量高溫化學藥液，這是*濕法制程的關鍵一步。這消除了冷卻化學樣品的需要。HORIBA 的 CS-600F 穩(wěn)定性高，實現了更有效和準確的化學藥液管理。

背景校正頻率顯著降低
與成熟型號（CS-100F1系列）相比，定期校正頻率顯著降低，這反過來又顯著減少了機臺停機時間，有助于提高產量。

單臺濃度計可測量多達六種化學藥液（藥液種類或濃度范圍）
單臺濃度計可測量多達六種化學藥液（藥液種類或濃度范圍）。可自由藥液類型和濃度范圍，CS-600F 保證滿足各種檢測要求。

可輸出多達六種組分的測量值（串行輸出）
成熟型號（CS-100F1 系列）可輸出四種組分的測量值（串行輸出）。CS-600F*號能以串行輸出方式輸出多達六種組分的測量值。CS-600F型號模擬輸出四種組分，而CS-100F1型號為兩種。

Model	CS-600F
Measurement principle	Absorption spectroscopic method
Calculation principle	Temperature compensation type multivariate analysis
Measurement target	NH3/H2O2/H2O (reperesentative specification) * Please contact HORIBA regarding other chemicals.
Measurement range	NH3：0.00～1.20mass%、H2O2：0.00～5.50mass%、 H2O：93.3～100.0mass%
Repeatability	NH3：±0.05mass%、H2O2：±10mass%、H2O：±1.0mass% Chemical temperature: Within ±1℃/1 hour
Sample solution temperature	20?80℃
Measurement cycle	Approx. 3 seconds
LCD display	(1) Measured value (%) (2) Concentration alarm (HH/H/L/LL) (3) Error code (EXXX) (4) Chemical temperature (°C) (5) Serial/parallel communication status (P/S) (6) The times of background correction failure (CXXX)
Key input	(1) Concentration alarm setting (HH/H/L/LL) (2) Concentration value shift (3) Background correction (4) Hot water correction (5) Temperature dependent concentration shift
Parallel input	Input voltage of 12 V to 30 V DC by insulating with photo coupler (1) Parallel concentration alarm output (On/Off) (2) Switching chemical solution for measurement (including background correction) (3) Hot water correction
Parallel output	Transistor output (NPN open collector) by insulating with photo coupler Maximum current when powered ON: 5 mA DC (no internal protective resistance) Maximum voltage when powered OFF: 30 V DC (1) Concentration alarm (ON at HH/H/L/LL alarm) (2) Monitor error (OFF at error) (3) Measuring (ON at measurement) (4) Chemical solution type for measurement (5) Echo to hot water correction input (6) Warning (ON at occurred) (7) Background correction status 8) Hot water correction status
Serial input	RS-232C (1) Request for readout of measurement data (2) Select chemical solution type to be measured (3) Hot water correction
Serial output	RS-232C (1) Measured data No. (2) Chemical solution type (3) Concentration value (4) Error code (5) Chemical temperature
Analog output	4 mA to 20 mA In case of monitor error occurs, measurement is stopped or invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.
Chemical solution temperature input	Terminal block inlet (terminal screw M3) Platinum resistance temperature sensor: Pt100 (Three-conductor type, Class A) *Temperature sensor is not included.
Air (for operation and purge)	Connection port: 4 mm O.D. quick joint, Pressure: 0.2 MPa ±0.02 Mpa
Power source	100～230V AC（Single-Phase）、50/60Hz
Power consumption	Approx. 85 VA (transient electric current at the time of the start is excluded)
Weight	(Monitor) Approx. 3.6 kg (Lamp unit) Approx. 2.8 kg (Sample cell) Approx. 1.2 kg
Ambient temperature	(Monitor, Lamp unit) 20°C to 30°C (Sample cell, Optical fiber) 20°C to 35°C (Sudden temperature change should be avoided, within ±1°C/1 hour)
Ambient humidity	(Monitor, Lamp unit, Sample cell) 40% to 70% (Should be no dew condensation)
Slanting angle at installation	(Monitor, Lamp unit) within ±1°
Optical fiber	Length: 5 m, minimum bend radius: R 150 mm

scrollable

Schematics

遠程感應器SX-10E2B

PT2.5R-1004-I2-D...