HORIBA光纖型高溫磷酸濃度計CS-620F可以在單槽或單晶圓清洗系統(tǒng)中檢測多種化學(xué)藥液

2025/02/13 14:25:09

CS-620F

光纖型高溫磷酸濃度計

關(guān)鍵詞：3D NAND、SiN（氮化硅）、刻蝕、高溫磷酸,

在 3D NAND 制程中，沉積幾十層二氧化硅和氮化硅，并使用高溫磷酸選擇性地刻蝕氮化硅層。
在該制程中，通過控制化學(xué)藥液的濃度和溫度，可以獲得期望的刻蝕速率。
成熟型號很難測量高溫化學(xué)藥液，但 CS-620F 能夠在高達 170℃ 的高溫下進行測量。
使用吸收光譜進行連續(xù)測量，與其他方法相比，需要的維護和耗材更少。

事業(yè)部: 半導(dǎo)體

產(chǎn)品分類: 濕法過程控制

制造商: HORIBA Advanced Techno Co., Ltd.

主要特征

可測量高達 92% 的高濃度磷酸

無需冷卻機制和冷卻時間。
無需冷卻循環(huán)管路中的高溫磷酸（140 至 170℃），可直接測量。

樣品使用PFA接觸，以降低污染風(fēng)險。

采用每半年一次的背景校正周期，有助于顯著減少機臺停機時間。

每3秒更新一次測量數(shù)據(jù)，有助于更快速使用濃度反饋進行控制

穩(wěn)定性

? 測量結(jié)果
樣品（實際藥液）測量 1 小時，展示出良好的穩(wěn)定性。

? 測量條件
測量周期：每3秒測量時間：1 小時移動平均數(shù)：16 次
樣品濃度（初始樣品濃度）H3PO4：92.2% H2O: 7.8% 樣品溫度：141°C

Product name CHEMICAL SOLUTION MONITOR

Model CS-620F

Measurement principle Absorption spectroscopic method

Calculation principle Temperature compensation type multivariate analysis

Sample H3PO4/H2O

Measurable range
Repeatability
Component Measurable range
(mass%) Repeatability
(mass%) Analog output
range(mass%)

1st solution H3PO4 85.00-92.00 +/-0.10 85.00-100.00

H2O 8.0-15.0 +/-0.3 0.0-15.0

? Repeatability is defined by maximum error from average (1 hour).
? In the case of low temperature measurement (140°C) and high temperature measurement (170°C) with the same chemical,
there is possibility of discrepancy (Maximum +/- 0.30%).

Conditions
of Measurement 1) Measurement interval: Approx. 3 sec. (minimum)
2) Moving average: 16 times

Connection fitting size 1 inch or 3/4 inch

Sample condition Sample temperature: 140 to 170°C
Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour)
Input pressure: 0.2 MPa or less
Pressure fluctuation: 0.02 MPa or less
Flow rate: 1 to 30 L/min

Air(for operation and purge) Connection port: 4 mm O.D. quick joint
Pressure: 0.2 MPa ± 0.02 MPa

Power source 100 to 230 V AC (Single-Phase), 50/60 Hz

Power consumption Approx.85 VA (Transient electric current at the time of the start is excluded)

Communication Parallel I/O, RS-232C, Analog output

Dimension (Monitor) 200 (W) × 308 (D) × 78 (H) mm
(Lamp unit) 200 (W) × 262 (D) × 100 (H) mm
(Sample cell) 240 (W) × 209 (D) × 205 (H) mm

Weight (Monitor) Approx.3.6 kg
(Lamp unit) Approx.2.8 kg
(Sample cell) Approx.3.0 kg

Ambient temperature (Monitor, Lamp unit) 20 to 30°C
(Optical fiber, Sample cell) 20 to 100°C
* Sudden temperature change should be avoided, within +/- 1°C/1hour

Ambient humidity (Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)

Slanting angle of installation (Monitor, Lamp unit) Within +/-1 degree
(Sample cell) Please install so that air bubbles do not stay up.

Optical fiber Length: 5 m, Bend radius: R150 mm

Product name	CHEMICAL SOLUTION MONITOR
Model	CS-620F
Measurement principle	Absorption spectroscopic method
Calculation principle	Temperature compensation type multivariate analysis
Sample	H3PO4/H2O
Measurable range Repeatability		Component	Measurable range (mass%)	Repeatability (mass%)	Analog output range(mass%)
1st solution	H3PO4	85.00-92.00	+/-0.10	85.00-100.00
H2O	8.0-15.0	+/-0.3	0.0-15.0
? Repeatability is defined by maximum error from average (1 hour). ? In the case of low temperature measurement (140°C) and high temperature measurement (170°C) with the same chemical, there is possibility of discrepancy (Maximum +/- 0.30%).
Conditions of Measurement	1) Measurement interval: Approx. 3 sec. (minimum) 2) Moving average: 16 times
Connection fitting size	1 inch or 3/4 inch
Sample condition	Sample temperature: 140 to 170°C Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour) Input pressure: 0.2 MPa or less Pressure fluctuation: 0.02 MPa or less Flow rate: 1 to 30 L/min
Air(for operation and purge)	Connection port: 4 mm O.D. quick joint Pressure: 0.2 MPa ± 0.02 MPa
Power source	100 to 230 V AC (Single-Phase), 50/60 Hz
Power consumption	Approx.85 VA (Transient electric current at the time of the start is excluded)
Communication	Parallel I/O, RS-232C, Analog output
Dimension	(Monitor) 200 (W) × 308 (D) × 78 (H) mm (Lamp unit) 200 (W) × 262 (D) × 100 (H) mm (Sample cell) 240 (W) × 209 (D) × 205 (H) mm
Weight	(Monitor) Approx.3.6 kg (Lamp unit) Approx.2.8 kg (Sample cell) Approx.3.0 kg
Ambient temperature	(Monitor, Lamp unit) 20 to 30°C (Optical fiber, Sample cell) 20 to 100°C * Sudden temperature change should be avoided, within +/- 1°C/1hour
Ambient humidity	(Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)
Slanting angle of installation	(Monitor, Lamp unit) Within +/-1 degree (Sample cell) Please install so that air bubbles do not stay up.
Optical fiber	Length: 5 m, Bend radius: R150 mm

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